JPS5578529A - Coating device for semiconductor substrate - Google Patents
Coating device for semiconductor substrateInfo
- Publication number
- JPS5578529A JPS5578529A JP15196878A JP15196878A JPS5578529A JP S5578529 A JPS5578529 A JP S5578529A JP 15196878 A JP15196878 A JP 15196878A JP 15196878 A JP15196878 A JP 15196878A JP S5578529 A JPS5578529 A JP S5578529A
- Authority
- JP
- Japan
- Prior art keywords
- coating liquid
- semiconductor substrate
- solenoid valve
- feed
- coating device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE: To reform a coating liquid feed unit and also to automate a device by preventing undesired coating liquid from dripping through nozzle after injection.
CONSTITUTION: A high pressure source 11 to feed a coating liquid is connected to an airtight vessel 12 containing the coating liquid 14 through a conduit 13. A nozzle 15 is then opposed to a semiconductor substrate 7 to coat and connected to the vessel 12 through feed liquid conduit 23. And the first solenoid valve 16, the second solenoid valve 26 and a diaphragm type solenoid valve 36 are provided halfway on the conduits 13, 23, which are controlled by a controller.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15196878A JPS5578529A (en) | 1978-12-11 | 1978-12-11 | Coating device for semiconductor substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15196878A JPS5578529A (en) | 1978-12-11 | 1978-12-11 | Coating device for semiconductor substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5578529A true JPS5578529A (en) | 1980-06-13 |
Family
ID=15530144
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15196878A Pending JPS5578529A (en) | 1978-12-11 | 1978-12-11 | Coating device for semiconductor substrate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5578529A (en) |
-
1978
- 1978-12-11 JP JP15196878A patent/JPS5578529A/en active Pending
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