JPS55108741A - Resist coating device - Google Patents

Resist coating device

Info

Publication number
JPS55108741A
JPS55108741A JP1642579A JP1642579A JPS55108741A JP S55108741 A JPS55108741 A JP S55108741A JP 1642579 A JP1642579 A JP 1642579A JP 1642579 A JP1642579 A JP 1642579A JP S55108741 A JPS55108741 A JP S55108741A
Authority
JP
Japan
Prior art keywords
resist
pipe
dispence
nozzle
solenoid valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1642579A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6360529B2 (enrdf_load_stackoverflow
Inventor
Shinichi Suzuki
Hisashi Suemitsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pioneer Corp
Original Assignee
Pioneer Electronic Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pioneer Electronic Corp filed Critical Pioneer Electronic Corp
Priority to JP1642579A priority Critical patent/JPS55108741A/ja
Publication of JPS55108741A publication Critical patent/JPS55108741A/ja
Publication of JPS6360529B2 publication Critical patent/JPS6360529B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP1642579A 1979-02-15 1979-02-15 Resist coating device Granted JPS55108741A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1642579A JPS55108741A (en) 1979-02-15 1979-02-15 Resist coating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1642579A JPS55108741A (en) 1979-02-15 1979-02-15 Resist coating device

Publications (2)

Publication Number Publication Date
JPS55108741A true JPS55108741A (en) 1980-08-21
JPS6360529B2 JPS6360529B2 (enrdf_load_stackoverflow) 1988-11-24

Family

ID=11915876

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1642579A Granted JPS55108741A (en) 1979-02-15 1979-02-15 Resist coating device

Country Status (1)

Country Link
JP (1) JPS55108741A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6012175A (ja) * 1983-06-30 1985-01-22 Tokyo Denshi Kagaku Kabushiki 塗布液の供給方法
JPH0194620A (ja) * 1987-10-06 1989-04-13 Mitsubishi Electric Corp スピン塗布装置
US5134962A (en) * 1989-09-29 1992-08-04 Hitachi, Ltd. Spin coating apparatus
JP2005311098A (ja) * 2004-04-22 2005-11-04 Toppan Printing Co Ltd レジスト吐出装置及びそれを用いたレジスト塗布装置及びレジスト塗布方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5081067A (enrdf_load_stackoverflow) * 1973-11-16 1975-07-01
JPS5337576U (enrdf_load_stackoverflow) * 1976-09-06 1978-04-01

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5081067A (enrdf_load_stackoverflow) * 1973-11-16 1975-07-01
JPS5337576U (enrdf_load_stackoverflow) * 1976-09-06 1978-04-01

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6012175A (ja) * 1983-06-30 1985-01-22 Tokyo Denshi Kagaku Kabushiki 塗布液の供給方法
JPH0194620A (ja) * 1987-10-06 1989-04-13 Mitsubishi Electric Corp スピン塗布装置
US5134962A (en) * 1989-09-29 1992-08-04 Hitachi, Ltd. Spin coating apparatus
JP2005311098A (ja) * 2004-04-22 2005-11-04 Toppan Printing Co Ltd レジスト吐出装置及びそれを用いたレジスト塗布装置及びレジスト塗布方法

Also Published As

Publication number Publication date
JPS6360529B2 (enrdf_load_stackoverflow) 1988-11-24

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