JPS5081067A - - Google Patents

Info

Publication number
JPS5081067A
JPS5081067A JP12825473A JP12825473A JPS5081067A JP S5081067 A JPS5081067 A JP S5081067A JP 12825473 A JP12825473 A JP 12825473A JP 12825473 A JP12825473 A JP 12825473A JP S5081067 A JPS5081067 A JP S5081067A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12825473A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12825473A priority Critical patent/JPS5081067A/ja
Publication of JPS5081067A publication Critical patent/JPS5081067A/ja
Pending legal-status Critical Current

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  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP12825473A 1973-11-16 1973-11-16 Pending JPS5081067A (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12825473A JPS5081067A (enrdf_load_stackoverflow) 1973-11-16 1973-11-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12825473A JPS5081067A (enrdf_load_stackoverflow) 1973-11-16 1973-11-16

Publications (1)

Publication Number Publication Date
JPS5081067A true JPS5081067A (enrdf_load_stackoverflow) 1975-07-01

Family

ID=14980293

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12825473A Pending JPS5081067A (enrdf_load_stackoverflow) 1973-11-16 1973-11-16

Country Status (1)

Country Link
JP (1) JPS5081067A (enrdf_load_stackoverflow)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55108741A (en) * 1979-02-15 1980-08-21 Pioneer Electronic Corp Resist coating device
JPS57162666A (en) * 1981-03-30 1982-10-06 Tokyo Denshi Kagaku Kabushiki Liquid dropping device
JPS57173839A (en) * 1981-04-21 1982-10-26 Oki Electric Ind Co Ltd Resist coating device
JPS58214373A (ja) * 1982-05-24 1983-12-13 イ−ストマン　コダック　カンパニ− 液体の塗布装置
JPS6122627A (ja) * 1984-07-10 1986-01-31 Mitsubishi Electric Corp 感光性樹脂塗布装置
JPS62190338U (enrdf_load_stackoverflow) * 1986-05-27 1987-12-03
JPS6437838A (en) * 1987-08-03 1989-02-08 Nec Corp Chemical liquid coater
JPH0246730A (ja) * 1988-08-08 1990-02-16 Nec Corp 塗布膜形成用ディスペンサ
JPH0286826A (ja) * 1989-07-07 1990-03-27 Hitachi Ltd 被加工物の処理方法
JPH0286827A (ja) * 1989-07-07 1990-03-27 Hitachi Ltd 液体処理装置
JPH03139832A (ja) * 1989-10-25 1991-06-14 Ebara Corp ジェットスクラバー
JPH03143558A (ja) * 1989-10-30 1991-06-19 Ebara Corp ジェットスクラバー
JPH03148825A (ja) * 1989-11-06 1991-06-25 Ebara Corp ジェットスクラバー

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55108741A (en) * 1979-02-15 1980-08-21 Pioneer Electronic Corp Resist coating device
JPS57162666A (en) * 1981-03-30 1982-10-06 Tokyo Denshi Kagaku Kabushiki Liquid dropping device
JPS57173839A (en) * 1981-04-21 1982-10-26 Oki Electric Ind Co Ltd Resist coating device
JPS58214373A (ja) * 1982-05-24 1983-12-13 イ−ストマン　コダック　カンパニ− 液体の塗布装置
JPS6122627A (ja) * 1984-07-10 1986-01-31 Mitsubishi Electric Corp 感光性樹脂塗布装置
JPS62190338U (enrdf_load_stackoverflow) * 1986-05-27 1987-12-03
JPS6437838A (en) * 1987-08-03 1989-02-08 Nec Corp Chemical liquid coater
JPH0246730A (ja) * 1988-08-08 1990-02-16 Nec Corp 塗布膜形成用ディスペンサ
JPH0286826A (ja) * 1989-07-07 1990-03-27 Hitachi Ltd 被加工物の処理方法
JPH0286827A (ja) * 1989-07-07 1990-03-27 Hitachi Ltd 液体処理装置
JPH03139832A (ja) * 1989-10-25 1991-06-14 Ebara Corp ジェットスクラバー
JPH03143558A (ja) * 1989-10-30 1991-06-19 Ebara Corp ジェットスクラバー
JPH03148825A (ja) * 1989-11-06 1991-06-25 Ebara Corp ジェットスクラバー

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