JPS6359533B2 - - Google Patents

Info

Publication number
JPS6359533B2
JPS6359533B2 JP56121116A JP12111681A JPS6359533B2 JP S6359533 B2 JPS6359533 B2 JP S6359533B2 JP 56121116 A JP56121116 A JP 56121116A JP 12111681 A JP12111681 A JP 12111681A JP S6359533 B2 JPS6359533 B2 JP S6359533B2
Authority
JP
Japan
Prior art keywords
furnace core
core tube
film
deposits
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56121116A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5821826A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12111681A priority Critical patent/JPS5821826A/ja
Publication of JPS5821826A publication Critical patent/JPS5821826A/ja
Publication of JPS6359533B2 publication Critical patent/JPS6359533B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32394—Treating interior parts of workpieces

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
JP12111681A 1981-07-31 1981-07-31 半導体製造装置の堆積物除去方法 Granted JPS5821826A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12111681A JPS5821826A (ja) 1981-07-31 1981-07-31 半導体製造装置の堆積物除去方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12111681A JPS5821826A (ja) 1981-07-31 1981-07-31 半導体製造装置の堆積物除去方法

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP7894288A Division JPS63283031A (ja) 1988-03-31 1988-03-31 半導体製造装置
JP7894188A Division JPS63283030A (ja) 1988-03-31 1988-03-31 半導体製造装置

Publications (2)

Publication Number Publication Date
JPS5821826A JPS5821826A (ja) 1983-02-08
JPS6359533B2 true JPS6359533B2 (OSRAM) 1988-11-21

Family

ID=14803275

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12111681A Granted JPS5821826A (ja) 1981-07-31 1981-07-31 半導体製造装置の堆積物除去方法

Country Status (1)

Country Link
JP (1) JPS5821826A (OSRAM)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4657616A (en) * 1985-05-17 1987-04-14 Benzing Technologies, Inc. In-situ CVD chamber cleaner
JPS62237720A (ja) * 1986-04-08 1987-10-17 Agency Of Ind Science & Technol 分子線結晶成長装置
US4786352A (en) * 1986-09-12 1988-11-22 Benzing Technologies, Inc. Apparatus for in-situ chamber cleaning
JPS63283030A (ja) * 1988-03-31 1988-11-18 Seiko Epson Corp 半導体製造装置
JPS63283031A (ja) * 1988-03-31 1988-11-18 Seiko Epson Corp 半導体製造装置
CN117265502B (zh) * 2023-09-22 2024-04-26 安徽旭合新能源科技有限公司 一种cvd镀膜炉管和炉壁薄膜的清除方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50118977A (OSRAM) * 1974-03-02 1975-09-18
JPS5358490A (en) * 1976-11-05 1978-05-26 Mitsubishi Electric Corp Forming method for film
JPS5486968A (en) * 1977-12-23 1979-07-10 Hitachi Ltd Washing
JPS55138237A (en) * 1979-04-13 1980-10-28 Fujitsu Ltd Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPS5821826A (ja) 1983-02-08

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