JPS632435Y2 - - Google Patents

Info

Publication number
JPS632435Y2
JPS632435Y2 JP1983201899U JP20189983U JPS632435Y2 JP S632435 Y2 JPS632435 Y2 JP S632435Y2 JP 1983201899 U JP1983201899 U JP 1983201899U JP 20189983 U JP20189983 U JP 20189983U JP S632435 Y2 JPS632435 Y2 JP S632435Y2
Authority
JP
Japan
Prior art keywords
tube
wafer
reaction tube
wall protection
wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983201899U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60113368U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP20189983U priority Critical patent/JPS60113368U/ja
Publication of JPS60113368U publication Critical patent/JPS60113368U/ja
Application granted granted Critical
Publication of JPS632435Y2 publication Critical patent/JPS632435Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Chemical Vapour Deposition (AREA)
JP20189983U 1983-12-30 1983-12-30 化学的気相付着装置 Granted JPS60113368U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20189983U JPS60113368U (ja) 1983-12-30 1983-12-30 化学的気相付着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20189983U JPS60113368U (ja) 1983-12-30 1983-12-30 化学的気相付着装置

Publications (2)

Publication Number Publication Date
JPS60113368U JPS60113368U (ja) 1985-07-31
JPS632435Y2 true JPS632435Y2 (OSRAM) 1988-01-21

Family

ID=30764113

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20189983U Granted JPS60113368U (ja) 1983-12-30 1983-12-30 化学的気相付着装置

Country Status (1)

Country Link
JP (1) JPS60113368U (OSRAM)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5436063A (en) * 1977-08-24 1979-03-16 Kubota Ltd Method of removing nitrogen from filthy water

Also Published As

Publication number Publication date
JPS60113368U (ja) 1985-07-31

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