JPS6357906B2 - - Google Patents

Info

Publication number
JPS6357906B2
JPS6357906B2 JP56004107A JP410781A JPS6357906B2 JP S6357906 B2 JPS6357906 B2 JP S6357906B2 JP 56004107 A JP56004107 A JP 56004107A JP 410781 A JP410781 A JP 410781A JP S6357906 B2 JPS6357906 B2 JP S6357906B2
Authority
JP
Japan
Prior art keywords
lens
magnetic pole
sample
working distance
lower magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56004107A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57118356A (en
Inventor
Seiichi Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP56004107A priority Critical patent/JPS57118356A/ja
Publication of JPS57118356A publication Critical patent/JPS57118356A/ja
Publication of JPS6357906B2 publication Critical patent/JPS6357906B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP56004107A 1981-01-14 1981-01-14 Objective lens for scan type electron microscope Granted JPS57118356A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56004107A JPS57118356A (en) 1981-01-14 1981-01-14 Objective lens for scan type electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56004107A JPS57118356A (en) 1981-01-14 1981-01-14 Objective lens for scan type electron microscope

Publications (2)

Publication Number Publication Date
JPS57118356A JPS57118356A (en) 1982-07-23
JPS6357906B2 true JPS6357906B2 (OSRAM) 1988-11-14

Family

ID=11575563

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56004107A Granted JPS57118356A (en) 1981-01-14 1981-01-14 Objective lens for scan type electron microscope

Country Status (1)

Country Link
JP (1) JPS57118356A (OSRAM)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58198837A (ja) * 1982-05-15 1983-11-18 Akashi Seisakusho Co Ltd 電子顕微鏡およびその類似装置
JPS5960954A (ja) * 1982-09-30 1984-04-07 Fujitsu Ltd 電子ビ−ム露光装置
JPS5994350A (ja) * 1982-11-19 1984-05-31 Akashi Seisakusho Co Ltd 電磁式対物レンズ
JPS6074250A (ja) * 1983-09-29 1985-04-26 Jeol Ltd 磁界型レンズ
JP2772821B2 (ja) * 1989-05-30 1998-07-09 セイコーインスツルメンツ株式会社 電子線装置
US6366014B1 (en) 1997-08-01 2002-04-02 Canon Kabushiki Kaisha Charge-up suppressing member, charge-up suppressing film, electron beam apparatus, and image forming apparatus
GB9807592D0 (en) * 1998-04-08 1998-06-10 Shimadzu Res Lab Europe Ltd Magnetic immersion lenses
JP5492032B2 (ja) * 2010-09-03 2014-05-14 日本電子株式会社 走査電子顕微鏡及び走査電子顕微鏡の対物レンズの用途切替方法
JP2014041734A (ja) 2012-08-22 2014-03-06 Hitachi High-Technologies Corp 複合荷電粒子線装置

Also Published As

Publication number Publication date
JPS57118356A (en) 1982-07-23

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