JPH0532926Y2 - - Google Patents

Info

Publication number
JPH0532926Y2
JPH0532926Y2 JP1984043066U JP4306684U JPH0532926Y2 JP H0532926 Y2 JPH0532926 Y2 JP H0532926Y2 JP 1984043066 U JP1984043066 U JP 1984043066U JP 4306684 U JP4306684 U JP 4306684U JP H0532926 Y2 JPH0532926 Y2 JP H0532926Y2
Authority
JP
Japan
Prior art keywords
magnetic pole
pole piece
lower magnetic
lens
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1984043066U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60155162U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4306684U priority Critical patent/JPS60155162U/ja
Publication of JPS60155162U publication Critical patent/JPS60155162U/ja
Application granted granted Critical
Publication of JPH0532926Y2 publication Critical patent/JPH0532926Y2/ja
Granted legal-status Critical Current

Links

JP4306684U 1984-03-26 1984-03-26 走査電子顕微鏡用対物レンズ Granted JPS60155162U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4306684U JPS60155162U (ja) 1984-03-26 1984-03-26 走査電子顕微鏡用対物レンズ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4306684U JPS60155162U (ja) 1984-03-26 1984-03-26 走査電子顕微鏡用対物レンズ

Publications (2)

Publication Number Publication Date
JPS60155162U JPS60155162U (ja) 1985-10-16
JPH0532926Y2 true JPH0532926Y2 (OSRAM) 1993-08-23

Family

ID=30554390

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4306684U Granted JPS60155162U (ja) 1984-03-26 1984-03-26 走査電子顕微鏡用対物レンズ

Country Status (1)

Country Link
JP (1) JPS60155162U (OSRAM)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6012739B2 (ja) * 1980-06-06 1985-04-03 日本電子株式会社 走査電子顕微鏡等用対物レンズ
JPS57145259A (en) * 1981-03-03 1982-09-08 Akashi Seisakusho Co Ltd Scanning type electron microscope and its similar device

Also Published As

Publication number Publication date
JPS60155162U (ja) 1985-10-16

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