JPH0518840Y2 - - Google Patents

Info

Publication number
JPH0518840Y2
JPH0518840Y2 JP725787U JP725787U JPH0518840Y2 JP H0518840 Y2 JPH0518840 Y2 JP H0518840Y2 JP 725787 U JP725787 U JP 725787U JP 725787 U JP725787 U JP 725787U JP H0518840 Y2 JPH0518840 Y2 JP H0518840Y2
Authority
JP
Japan
Prior art keywords
magnetic pole
pole piece
cylindrical member
lens
movable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP725787U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63117049U (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP725787U priority Critical patent/JPH0518840Y2/ja
Publication of JPS63117049U publication Critical patent/JPS63117049U/ja
Application granted granted Critical
Publication of JPH0518840Y2 publication Critical patent/JPH0518840Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP725787U 1987-01-21 1987-01-21 Expired - Lifetime JPH0518840Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP725787U JPH0518840Y2 (OSRAM) 1987-01-21 1987-01-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP725787U JPH0518840Y2 (OSRAM) 1987-01-21 1987-01-21

Publications (2)

Publication Number Publication Date
JPS63117049U JPS63117049U (OSRAM) 1988-07-28
JPH0518840Y2 true JPH0518840Y2 (OSRAM) 1993-05-19

Family

ID=30790544

Family Applications (1)

Application Number Title Priority Date Filing Date
JP725787U Expired - Lifetime JPH0518840Y2 (OSRAM) 1987-01-21 1987-01-21

Country Status (1)

Country Link
JP (1) JPH0518840Y2 (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110431649A (zh) * 2017-03-29 2019-11-08 株式会社日立高新技术 带电粒子束装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110431649A (zh) * 2017-03-29 2019-11-08 株式会社日立高新技术 带电粒子束装置

Also Published As

Publication number Publication date
JPS63117049U (OSRAM) 1988-07-28

Similar Documents

Publication Publication Date Title
US9741527B2 (en) Specimen holder for a charged particle microscope
JP5351634B2 (ja) 電子線装置
JP3133307B2 (ja) 電子顕微鏡
JP5746284B2 (ja) 物体を加工するシステムおよび方法
US4460827A (en) Scanning electron microscope or similar equipment with tiltable microscope column
JPS62223957A (ja) ハイブリツド荷電粒子光学系
US7253408B2 (en) Environmental cell for a scanning probe microscope
US5105932A (en) Linear and rotary positioning device
JPH0518840Y2 (OSRAM)
US20180061613A1 (en) Charged-particle microscope with exchangeable pole piece extending element
JP2004087214A (ja) 荷電粒子線装置用試料ホールダ
JP2005010059A (ja) 走査形プローブ顕微鏡
JP2019129210A (ja) ステージ装置、及び処理装置
JPS63291347A (ja) 電子顕微鏡等における試料装置
JP6450153B2 (ja) Ｘ線像撮像用ユニット、電子顕微鏡及び試料像取得方法
JPH055841A (ja) 真空対応顕微鏡
JP3926208B2 (ja) Ｘ線顕微鏡試料室
JPH0451415Y2 (OSRAM)
JPH0532926Y2 (OSRAM)
JPS6321886Y2 (OSRAM)
JP2002319365A (ja) ステージ及びｆｉｂ試料作成装置
JPS5849568Y2 (ja) 電子顕微鏡等における試料装置
JP3702685B2 (ja) 荷電粒子線装置
US20250323008A1 (en) Focused Ion Beam System
JP2003344258A (ja) 磁気力顕微鏡の垂直磁場印加装置