JPS57118356A - Objective lens for scan type electron microscope - Google Patents
Objective lens for scan type electron microscopeInfo
- Publication number
- JPS57118356A JPS57118356A JP410781A JP410781A JPS57118356A JP S57118356 A JPS57118356 A JP S57118356A JP 410781 A JP410781 A JP 410781A JP 410781 A JP410781 A JP 410781A JP S57118356 A JPS57118356 A JP S57118356A
- Authority
- JP
- Japan
- Prior art keywords
- lower magnetic
- magnetic pole
- working distance
- objective lens
- electron microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
- H01J37/141—Electromagnetic lenses
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP410781A JPS57118356A (en) | 1981-01-14 | 1981-01-14 | Objective lens for scan type electron microscope |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP410781A JPS57118356A (en) | 1981-01-14 | 1981-01-14 | Objective lens for scan type electron microscope |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57118356A true JPS57118356A (en) | 1982-07-23 |
JPS6357906B2 JPS6357906B2 (ja) | 1988-11-14 |
Family
ID=11575563
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP410781A Granted JPS57118356A (en) | 1981-01-14 | 1981-01-14 | Objective lens for scan type electron microscope |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57118356A (ja) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58198837A (ja) * | 1982-05-15 | 1983-11-18 | Akashi Seisakusho Co Ltd | 電子顕微鏡およびその類似装置 |
JPS5960954A (ja) * | 1982-09-30 | 1984-04-07 | Fujitsu Ltd | 電子ビ−ム露光装置 |
JPS5994350A (ja) * | 1982-11-19 | 1984-05-31 | Akashi Seisakusho Co Ltd | 電磁式対物レンズ |
JPS6074250A (ja) * | 1983-09-29 | 1985-04-26 | Jeol Ltd | 磁界型レンズ |
JPH031432A (ja) * | 1989-05-30 | 1991-01-08 | Seiko Instr Inc | 電子線装置 |
WO1999053517A1 (en) * | 1998-04-08 | 1999-10-21 | Shimadzu Research Laboratory (Europe) Ltd. | Magnetic immersion lenses |
US6366014B1 (en) | 1997-08-01 | 2002-04-02 | Canon Kabushiki Kaisha | Charge-up suppressing member, charge-up suppressing film, electron beam apparatus, and image forming apparatus |
JP2012054169A (ja) * | 2010-09-03 | 2012-03-15 | Jeol Ltd | 走査電子顕微鏡及び走査電子顕微鏡の対物レンズの用途切替方法 |
WO2014030433A1 (ja) * | 2012-08-22 | 2014-02-27 | 株式会社 日立ハイテクノロジーズ | 複合荷電粒子線装置 |
-
1981
- 1981-01-14 JP JP410781A patent/JPS57118356A/ja active Granted
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58198837A (ja) * | 1982-05-15 | 1983-11-18 | Akashi Seisakusho Co Ltd | 電子顕微鏡およびその類似装置 |
JPS5960954A (ja) * | 1982-09-30 | 1984-04-07 | Fujitsu Ltd | 電子ビ−ム露光装置 |
JPS5994350A (ja) * | 1982-11-19 | 1984-05-31 | Akashi Seisakusho Co Ltd | 電磁式対物レンズ |
JPS6074250A (ja) * | 1983-09-29 | 1985-04-26 | Jeol Ltd | 磁界型レンズ |
JPH031432A (ja) * | 1989-05-30 | 1991-01-08 | Seiko Instr Inc | 電子線装置 |
US6366014B1 (en) | 1997-08-01 | 2002-04-02 | Canon Kabushiki Kaisha | Charge-up suppressing member, charge-up suppressing film, electron beam apparatus, and image forming apparatus |
GB2352325A (en) * | 1998-04-08 | 2001-01-24 | Shimadzu Res Lab | Magnetic immersion lenses |
WO1999053517A1 (en) * | 1998-04-08 | 1999-10-21 | Shimadzu Research Laboratory (Europe) Ltd. | Magnetic immersion lenses |
GB2352325B (en) * | 1998-04-08 | 2002-06-19 | Shimadzu Res Lab | Magnetic immersion lenses |
JP2012054169A (ja) * | 2010-09-03 | 2012-03-15 | Jeol Ltd | 走査電子顕微鏡及び走査電子顕微鏡の対物レンズの用途切替方法 |
WO2014030433A1 (ja) * | 2012-08-22 | 2014-02-27 | 株式会社 日立ハイテクノロジーズ | 複合荷電粒子線装置 |
JP2014041734A (ja) * | 2012-08-22 | 2014-03-06 | Hitachi High-Technologies Corp | 複合荷電粒子線装置 |
US9478389B2 (en) | 2012-08-22 | 2016-10-25 | Hitachi High-Technologies Corporation | Scanning electron microscope |
Also Published As
Publication number | Publication date |
---|---|
JPS6357906B2 (ja) | 1988-11-14 |
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