GB2352325B - Magnetic immersion lenses - Google Patents

Magnetic immersion lenses

Info

Publication number
GB2352325B
GB2352325B GB0023736A GB0023736A GB2352325B GB 2352325 B GB2352325 B GB 2352325B GB 0023736 A GB0023736 A GB 0023736A GB 0023736 A GB0023736 A GB 0023736A GB 2352325 B GB2352325 B GB 2352325B
Authority
GB
United Kingdom
Prior art keywords
immersion lenses
magnetic immersion
magnetic
lenses
immersion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB0023736A
Other versions
GB2352325A (en
GB0023736D0 (en
Inventor
Andrew Roderick Walker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Research Laboratory Europe Ltd
Original Assignee
Shimadzu Research Laboratory Europe Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Research Laboratory Europe Ltd filed Critical Shimadzu Research Laboratory Europe Ltd
Publication of GB0023736D0 publication Critical patent/GB0023736D0/en
Publication of GB2352325A publication Critical patent/GB2352325A/en
Application granted granted Critical
Publication of GB2352325B publication Critical patent/GB2352325B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/10—Lenses
    • H01J2237/103—Lenses characterised by lens type
    • H01J2237/1035—Immersion lens
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/10—Lenses
    • H01J2237/14—Lenses magnetic
    • H01J2237/1405—Constructional details

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
GB0023736A 1998-04-08 1999-03-25 Magnetic immersion lenses Expired - Fee Related GB2352325B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB9807592.2A GB9807592D0 (en) 1998-04-08 1998-04-08 Magnetic immersion lenses
PCT/GB1999/000945 WO1999053517A1 (en) 1998-04-08 1999-03-25 Magnetic immersion lenses

Publications (3)

Publication Number Publication Date
GB0023736D0 GB0023736D0 (en) 2000-11-08
GB2352325A GB2352325A (en) 2001-01-24
GB2352325B true GB2352325B (en) 2002-06-19

Family

ID=10830092

Family Applications (2)

Application Number Title Priority Date Filing Date
GBGB9807592.2A Ceased GB9807592D0 (en) 1998-04-08 1998-04-08 Magnetic immersion lenses
GB0023736A Expired - Fee Related GB2352325B (en) 1998-04-08 1999-03-25 Magnetic immersion lenses

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GBGB9807592.2A Ceased GB9807592D0 (en) 1998-04-08 1998-04-08 Magnetic immersion lenses

Country Status (3)

Country Link
AU (1) AU3156999A (en)
GB (2) GB9807592D0 (en)
WO (1) WO1999053517A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6362486B1 (en) * 1998-11-12 2002-03-26 Schlumberger Technologies, Inc. Magnetic lens for focusing a charged particle beam
GB0912332D0 (en) * 2009-07-16 2009-08-26 Vg Systems Ltd Magnetic lens,method for focussing charged particles and charged particle energy analyser

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS573357A (en) * 1980-06-06 1982-01-08 Jeol Ltd Objective lens for scanning electron microscope
JPS57118356A (en) * 1981-01-14 1982-07-23 Jeol Ltd Objective lens for scan type electron microscope
JPS5826439A (en) * 1981-08-11 1983-02-16 Internatl Precision Inc Objective lens of electron beam apparatus
US4419581A (en) * 1981-01-14 1983-12-06 Jeol Ltd. Magnetic objective lens for use in a scanning electron microscope
JPH08321272A (en) * 1995-05-24 1996-12-03 Jeol Ltd Objective lens for scanning electron microscope
US5729022A (en) * 1996-09-26 1998-03-17 Etec Systems, Inc. Composite concentric-gap magnetic lens and deflector with conical pole pieces

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS573357A (en) * 1980-06-06 1982-01-08 Jeol Ltd Objective lens for scanning electron microscope
JPS57118356A (en) * 1981-01-14 1982-07-23 Jeol Ltd Objective lens for scan type electron microscope
US4419581A (en) * 1981-01-14 1983-12-06 Jeol Ltd. Magnetic objective lens for use in a scanning electron microscope
JPS5826439A (en) * 1981-08-11 1983-02-16 Internatl Precision Inc Objective lens of electron beam apparatus
JPH08321272A (en) * 1995-05-24 1996-12-03 Jeol Ltd Objective lens for scanning electron microscope
US5729022A (en) * 1996-09-26 1998-03-17 Etec Systems, Inc. Composite concentric-gap magnetic lens and deflector with conical pole pieces

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
Patent Abstracts of Japan vol. 006, no. 060 & JP 57 003 357 A *
Patent Abstracts of Japan vol. 006, no. 215 & JP 57 118 356 A *
Patent Abstracts of Japan vol. 007, no. 103 & JP 58 026 439 A *
Patent Abstracts of Japan vol. 097, no. 004 & JP 08 321 272 A *

Also Published As

Publication number Publication date
GB2352325A (en) 2001-01-24
AU3156999A (en) 1999-11-01
GB0023736D0 (en) 2000-11-08
GB9807592D0 (en) 1998-06-10
WO1999053517A1 (en) 1999-10-21

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20180325