JPS635635U - - Google Patents

Info

Publication number
JPS635635U
JPS635635U JP10076686U JP10076686U JPS635635U JP S635635 U JPS635635 U JP S635635U JP 10076686 U JP10076686 U JP 10076686U JP 10076686 U JP10076686 U JP 10076686U JP S635635 U JPS635635 U JP S635635U
Authority
JP
Japan
Prior art keywords
plasma
substrate
sample chamber
substrate holder
extraction window
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10076686U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0452994Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10076686U priority Critical patent/JPH0452994Y2/ja
Publication of JPS635635U publication Critical patent/JPS635635U/ja
Application granted granted Critical
Publication of JPH0452994Y2 publication Critical patent/JPH0452994Y2/ja
Expired legal-status Critical Current

Links

JP10076686U 1986-06-28 1986-06-28 Expired JPH0452994Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10076686U JPH0452994Y2 (enExample) 1986-06-28 1986-06-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10076686U JPH0452994Y2 (enExample) 1986-06-28 1986-06-28

Publications (2)

Publication Number Publication Date
JPS635635U true JPS635635U (enExample) 1988-01-14
JPH0452994Y2 JPH0452994Y2 (enExample) 1992-12-14

Family

ID=30970895

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10076686U Expired JPH0452994Y2 (enExample) 1986-06-28 1986-06-28

Country Status (1)

Country Link
JP (1) JPH0452994Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011125471A1 (ja) * 2010-03-31 2011-10-13 東京エレクトロン株式会社 プラズマ処理装置及びプラズマ処理方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011125471A1 (ja) * 2010-03-31 2011-10-13 東京エレクトロン株式会社 プラズマ処理装置及びプラズマ処理方法

Also Published As

Publication number Publication date
JPH0452994Y2 (enExample) 1992-12-14

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