JPS6355541U - - Google Patents
Info
- Publication number
- JPS6355541U JPS6355541U JP1986150040U JP15004086U JPS6355541U JP S6355541 U JPS6355541 U JP S6355541U JP 1986150040 U JP1986150040 U JP 1986150040U JP 15004086 U JP15004086 U JP 15004086U JP S6355541 U JPS6355541 U JP S6355541U
- Authority
- JP
- Japan
- Prior art keywords
- pusher
- tray
- wafer transfer
- wafers
- cassettes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986150040U JPS6355541U (enExample) | 1986-09-30 | 1986-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986150040U JPS6355541U (enExample) | 1986-09-30 | 1986-09-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6355541U true JPS6355541U (enExample) | 1988-04-14 |
Family
ID=31065810
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986150040U Pending JPS6355541U (enExample) | 1986-09-30 | 1986-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6355541U (enExample) |
-
1986
- 1986-09-30 JP JP1986150040U patent/JPS6355541U/ja active Pending
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