JPH0436225U - - Google Patents

Info

Publication number
JPH0436225U
JPH0436225U JP1990078099U JP7809990U JPH0436225U JP H0436225 U JPH0436225 U JP H0436225U JP 1990078099 U JP1990078099 U JP 1990078099U JP 7809990 U JP7809990 U JP 7809990U JP H0436225 U JPH0436225 U JP H0436225U
Authority
JP
Japan
Prior art keywords
substrate
substrates
substrate transfer
interface device
transfer means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1990078099U
Other languages
English (en)
Japanese (ja)
Other versions
JP2550484Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990078099U priority Critical patent/JP2550484Y2/ja
Priority to EP91112250A priority patent/EP0468409B1/en
Priority to DE69113553T priority patent/DE69113553T2/de
Priority to KR1019910012615A priority patent/KR950001754B1/ko
Publication of JPH0436225U publication Critical patent/JPH0436225U/ja
Priority to US08/080,652 priority patent/US5308210A/en
Application granted granted Critical
Publication of JP2550484Y2 publication Critical patent/JP2550484Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1990078099U 1990-07-23 1990-07-23 基板処理装置間のインターフェイス装置 Expired - Lifetime JP2550484Y2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP1990078099U JP2550484Y2 (ja) 1990-07-23 1990-07-23 基板処理装置間のインターフェイス装置
EP91112250A EP0468409B1 (en) 1990-07-23 1991-07-22 Interface apparatus for transporting substrates between substrate processing apparatus
DE69113553T DE69113553T2 (de) 1990-07-23 1991-07-22 Schnittstellenvorrichtung zum Transportieren von Substraten zwischen Verarbeitungsgeräten.
KR1019910012615A KR950001754B1 (ko) 1990-07-23 1991-07-23 기판처리장치간의 기판수도용 인터페이스 장치
US08/080,652 US5308210A (en) 1990-07-23 1993-06-22 Interface apparatus for transporting substrates between substrate processing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990078099U JP2550484Y2 (ja) 1990-07-23 1990-07-23 基板処理装置間のインターフェイス装置

Publications (2)

Publication Number Publication Date
JPH0436225U true JPH0436225U (enExample) 1992-03-26
JP2550484Y2 JP2550484Y2 (ja) 1997-10-15

Family

ID=31621075

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990078099U Expired - Lifetime JP2550484Y2 (ja) 1990-07-23 1990-07-23 基板処理装置間のインターフェイス装置

Country Status (1)

Country Link
JP (1) JP2550484Y2 (enExample)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62195118A (ja) * 1986-02-21 1987-08-27 Hitachi Ltd フオトレジスト現像装置
JPS62213259A (ja) * 1986-03-14 1987-09-19 Shinkawa Ltd バツフア装置
JPS63139811A (ja) * 1986-11-29 1988-06-11 Toshiba Corp 枚葉製造装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62195118A (ja) * 1986-02-21 1987-08-27 Hitachi Ltd フオトレジスト現像装置
JPS62213259A (ja) * 1986-03-14 1987-09-19 Shinkawa Ltd バツフア装置
JPS63139811A (ja) * 1986-11-29 1988-06-11 Toshiba Corp 枚葉製造装置

Also Published As

Publication number Publication date
JP2550484Y2 (ja) 1997-10-15

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