JPH0436225U - - Google Patents

Info

Publication number
JPH0436225U
JPH0436225U JP1990078099U JP7809990U JPH0436225U JP H0436225 U JPH0436225 U JP H0436225U JP 1990078099 U JP1990078099 U JP 1990078099U JP 7809990 U JP7809990 U JP 7809990U JP H0436225 U JPH0436225 U JP H0436225U
Authority
JP
Japan
Prior art keywords
substrate
substrates
substrate transfer
interface device
transfer means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1990078099U
Other languages
Japanese (ja)
Other versions
JP2550484Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990078099U priority Critical patent/JP2550484Y2/en
Priority to DE69113553T priority patent/DE69113553T2/en
Priority to EP91112250A priority patent/EP0468409B1/en
Priority to KR1019910012615A priority patent/KR950001754B1/en
Publication of JPH0436225U publication Critical patent/JPH0436225U/ja
Priority to US08/080,652 priority patent/US5308210A/en
Application granted granted Critical
Publication of JP2550484Y2 publication Critical patent/JP2550484Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案に係る基板処理装置間のインタ
ーフエイス装置の要部平面図、第２図はインター
フエイス装置の側面図、第３図は基板受渡し機構
の平面図、第４図は基板受渡し機構の側面図、第
５図は基板受渡し機構の正面図、第６図は基板保
管部への基板収納機構を抜き出して示した斜視図
、第７図および第８図は基板位置決め手段の動作
説明図である。 １……上手側プロセス装置、２……下手側プロ
セス装置、３……インターフエイス装置、６……
基板受渡し機構、８……基板保管部、９……アー
ム（基板収納搬出機構）、１２……基板仮受けア
ーム。 Fig. 1 is a plan view of essential parts of an interface device between substrate processing apparatuses according to the present invention, Fig. 2 is a side view of the interface device, Fig. 3 is a plan view of a substrate transfer mechanism, and Fig. 4 is a plan view of a substrate transfer mechanism. A side view of the mechanism, FIG. 5 is a front view of the substrate delivery mechanism, FIG. 6 is a perspective view showing the substrate storage mechanism in the substrate storage section, and FIGS. 7 and 8 are explanations of the operation of the substrate positioning means. It is a diagram. 1... Upper process device, 2... Lower process device, 3... Interface device, 6...
Board delivery mechanism, 8... Board storage section, 9... Arm (board storage/unloading mechanism), 12... Board temporary receiving arm.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 第１の基板搬送手段によつて基板を順次複数の
プロセスユニツトに対して搬入・搬出する構造の
第１のプロセス装置と、第２の基板搬送手段によ
つて基板を単数あるいは複数のプロセスユニツト
に対して搬入・搬出する構造の第２のプロセス装
置との間に介在設置するインターフエイス装置に
おいて、前記両プロセス装置の各基板搬送手段と
の間で基板を受渡しする基板受渡し機構と、複数
枚の基板が収納可能な基板保管部とを備えるとと
もに、基板保管部と基板受渡し機構との間で基板
の出し入れを行う基板収納搬出機構を備えたこと
を特徴とする基板処理装置間のインターフエイス
装置。 A first process device has a structure in which substrates are sequentially transferred to and from a plurality of process units by a first substrate transfer means, and a substrate is transferred to one or more process units by a second substrate transfer means. In an interface device installed between a second process device and a second process device having a structure for carrying in and out, the interface device includes a substrate transfer mechanism that transfers substrates to and from each substrate transfer means of both process devices; An interface device between substrate processing apparatuses, comprising: a substrate storage section capable of storing substrates; and a substrate storage/unloading mechanism for loading/unloading substrates between the substrate storage section and a substrate transfer mechanism.
JP1990078099U 1990-07-23 1990-07-23 Interface device between substrate processing equipment Expired - Lifetime JP2550484Y2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP1990078099U JP2550484Y2 (en) 1990-07-23 1990-07-23 Interface device between substrate processing equipment
DE69113553T DE69113553T2 (en) 1990-07-23 1991-07-22 Interface device for transporting substrates between processing devices.
EP91112250A EP0468409B1 (en) 1990-07-23 1991-07-22 Interface apparatus for transporting substrates between substrate processing apparatus
KR1019910012615A KR950001754B1 (en) 1990-07-23 1991-07-23 Interface device between substrae processor
US08/080,652 US5308210A (en) 1990-07-23 1993-06-22 Interface apparatus for transporting substrates between substrate processing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990078099U JP2550484Y2 (en) 1990-07-23 1990-07-23 Interface device between substrate processing equipment

Publications (2)

Publication Number Publication Date
JPH0436225U true JPH0436225U (en) 1992-03-26
JP2550484Y2 JP2550484Y2 (en) 1997-10-15

Family

ID=31621075

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990078099U Expired - Lifetime JP2550484Y2 (en) 1990-07-23 1990-07-23 Interface device between substrate processing equipment

Country Status (1)

Country Link
JP (1) JP2550484Y2 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62195118A (en) * 1986-02-21 1987-08-27 Hitachi Ltd Photoresist developing device
JPS62213259A (en) * 1986-03-14 1987-09-19 Shinkawa Ltd Buffer apparatus
JPS63139811A (en) * 1986-11-29 1988-06-11 Toshiba Corp Manufacturing device for sheet

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62195118A (en) * 1986-02-21 1987-08-27 Hitachi Ltd Photoresist developing device
JPS62213259A (en) * 1986-03-14 1987-09-19 Shinkawa Ltd Buffer apparatus
JPS63139811A (en) * 1986-11-29 1988-06-11 Toshiba Corp Manufacturing device for sheet

Also Published As

Publication number Publication date
JP2550484Y2 (en) 1997-10-15

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