JPS59188664U - Wafer cassette case loading device - Google Patents
Wafer cassette case loading deviceInfo
- Publication number
- JPS59188664U JPS59188664U JP8176183U JP8176183U JPS59188664U JP S59188664 U JPS59188664 U JP S59188664U JP 8176183 U JP8176183 U JP 8176183U JP 8176183 U JP8176183 U JP 8176183U JP S59188664 U JPS59188664 U JP S59188664U
- Authority
- JP
- Japan
- Prior art keywords
- cassette case
- link
- movable table
- loading device
- moving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図はカセットケースの斜視図、第２図はイオン注入
装置の一部の側面線図、第３図は本発明の実施例の一部
截断側面図、第４図及び第５図は第３図のＩＶ−ＩＶ線
及び■−■線截断平面図、第６図は第３区の平面図であ
る。
１・・・・・・ウェハ、２・・・・・・カセットケース
、３，３・・・・・・テーブル、４・・・・・・旋回装
置、５・・・・・・ウェハ表面処理装置、６・・・・・
・カセットケース収容室、７・・・・・・移動台、８・
・・・・・移動テーブル、９・・・・・・横動テーブル
、１０・・・・・・リンク、１１・・・・・・腕片、１
２・・・・・・ばね。FIG. 1 is a perspective view of a cassette case, FIG. 2 is a side view of a part of the ion implanter, FIG. 3 is a partially cutaway side view of an embodiment of the present invention, and FIGS. FIG. 3 is a cross-sectional plan view taken along lines IV-IV and ■-■, and FIG. 6 is a plan view of the third section. 1...Wafer, 2...Cassette case, 3, 3...Table, 4...Swivel device, 5...Wafer surface treatment Device, 6...
・Cassette case storage chamber, 7...Movement stand, 8.
...Moving table, 9...Transverse movement table, 10...Link, 11...Arm piece, 1
2... Spring.
Claims (1)
が間隔を存して載置されたテーブル３゜３を上下２段に
配置し、これらテーブル３．３を同期して間歇的に旋回
させる旋回装置４に接続すると共に、各テーブル３．３
に沿って、これとその側方のイオン注入装置その他のウ
ェハ表面処理装置５のカセットケース収容室６との間を
該ケース２を載せて往復移動する移動台７を設ける式の
ものに於て、該移動台７を構成する移動テーブル８に、
その移動方向に対して横方向に移動可能な横動テーブル
９を設け、該横動テーブル９に該移動テーブル８に係着
したリンク１０の腕片１１を係合さぜ、移動テーブル８
がカセットケース収容室６に達して停止したとき移動テ
ーブル８の移動力で該リンク１０を揺動すべくばね１２
を介して該リンク１０と移動テーブル８を連結して成る
ウェハ用カセットケースの装填装置。Cassette case 2 that can accommodate wafers 1 in and out
Tables 3.3 on which tables 3.3 are placed at intervals are arranged in upper and lower tiers, and these tables 3.3 are connected to a rotating device 4 that rotates them intermittently in synchronization.
In the case of a type in which a moving table 7 is provided for carrying the case 2 and reciprocating between this and the cassette case storage chamber 6 of the ion implantation device or other wafer surface processing device 5 on the side thereof along the , on the movable table 8 constituting the movable table 7,
A transversely movable table 9 that is movable laterally with respect to the moving direction is provided, and the arm piece 11 of the link 10 that is attached to the movable table 8 is engaged with the transversely movable table 9.
When the link 10 reaches the cassette case storage chamber 6 and stops, the spring 12 swings the link 10 by the moving force of the moving table 8.
A loading device for a cassette case for wafers, which connects the link 10 and the moving table 8 via a wafer cassette case loading device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8176183U JPS59188664U (en) | 1983-06-01 | 1983-06-01 | Wafer cassette case loading device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8176183U JPS59188664U (en) | 1983-06-01 | 1983-06-01 | Wafer cassette case loading device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59188664U true JPS59188664U (en) | 1984-12-14 |
| JPH0228612Y2 JPH0228612Y2 (en) | 1990-07-31 |
Family
ID=30211717
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8176183U Granted JPS59188664U (en) | 1983-06-01 | 1983-06-01 | Wafer cassette case loading device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59188664U (en) |
-
1983
- 1983-06-01 JP JP8176183U patent/JPS59188664U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0228612Y2 (en) | 1990-07-31 |
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