JPS63142831U - - Google Patents
Info
- Publication number
- JPS63142831U JPS63142831U JP1987035683U JP3568387U JPS63142831U JP S63142831 U JPS63142831 U JP S63142831U JP 1987035683 U JP1987035683 U JP 1987035683U JP 3568387 U JP3568387 U JP 3568387U JP S63142831 U JPS63142831 U JP S63142831U
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- pair
- liquid
- arms holding
- processing position
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987035683U JPS63142831U (enExample) | 1987-03-10 | 1987-03-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987035683U JPS63142831U (enExample) | 1987-03-10 | 1987-03-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63142831U true JPS63142831U (enExample) | 1988-09-20 |
Family
ID=30845389
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987035683U Pending JPS63142831U (enExample) | 1987-03-10 | 1987-03-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63142831U (enExample) |
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1987
- 1987-03-10 JP JP1987035683U patent/JPS63142831U/ja active Pending