JPS6346845U - - Google Patents
Info
- Publication number
- JPS6346845U JPS6346845U JP14051486U JP14051486U JPS6346845U JP S6346845 U JPS6346845 U JP S6346845U JP 14051486 U JP14051486 U JP 14051486U JP 14051486 U JP14051486 U JP 14051486U JP S6346845 U JPS6346845 U JP S6346845U
- Authority
- JP
- Japan
- Prior art keywords
- holding means
- sample holding
- arm
- rotary arm
- specimens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14051486U JPS6346845U (enExample) | 1986-09-16 | 1986-09-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14051486U JPS6346845U (enExample) | 1986-09-16 | 1986-09-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6346845U true JPS6346845U (enExample) | 1988-03-30 |
Family
ID=31047430
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14051486U Pending JPS6346845U (enExample) | 1986-09-16 | 1986-09-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6346845U (enExample) |
-
1986
- 1986-09-16 JP JP14051486U patent/JPS6346845U/ja active Pending