JPS63123050U - - Google Patents
Info
- Publication number
- JPS63123050U JPS63123050U JP1432487U JP1432487U JPS63123050U JP S63123050 U JPS63123050 U JP S63123050U JP 1432487 U JP1432487 U JP 1432487U JP 1432487 U JP1432487 U JP 1432487U JP S63123050 U JPS63123050 U JP S63123050U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- disk
- high speed
- ion implantation
- preparatory
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 3
- 238000005468 ion implantation Methods 0.000 claims 2
- 238000001035 drying Methods 0.000 claims 1
- 238000002513 implantation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1432487U JPS63123050U (enExample) | 1987-02-03 | 1987-02-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1432487U JPS63123050U (enExample) | 1987-02-03 | 1987-02-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63123050U true JPS63123050U (enExample) | 1988-08-10 |
Family
ID=30804203
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1432487U Pending JPS63123050U (enExample) | 1987-02-03 | 1987-02-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63123050U (enExample) |
-
1987
- 1987-02-03 JP JP1432487U patent/JPS63123050U/ja active Pending
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