JPS6380843U - - Google Patents
Info
- Publication number
- JPS6380843U JPS6380843U JP17579686U JP17579686U JPS6380843U JP S6380843 U JPS6380843 U JP S6380843U JP 17579686 U JP17579686 U JP 17579686U JP 17579686 U JP17579686 U JP 17579686U JP S6380843 U JPS6380843 U JP S6380843U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- holder
- horizontal state
- processing chamber
- state
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 6
- 238000010884 ion-beam technique Methods 0.000 claims description 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17579686U JPS6380843U (enExample) | 1986-11-15 | 1986-11-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17579686U JPS6380843U (enExample) | 1986-11-15 | 1986-11-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6380843U true JPS6380843U (enExample) | 1988-05-27 |
Family
ID=31115448
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17579686U Pending JPS6380843U (enExample) | 1986-11-15 | 1986-11-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6380843U (enExample) |
-
1986
- 1986-11-15 JP JP17579686U patent/JPS6380843U/ja active Pending
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