JPS6382936U - - Google Patents
Info
- Publication number
- JPS6382936U JPS6382936U JP17705786U JP17705786U JPS6382936U JP S6382936 U JPS6382936 U JP S6382936U JP 17705786 U JP17705786 U JP 17705786U JP 17705786 U JP17705786 U JP 17705786U JP S6382936 U JPS6382936 U JP S6382936U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- chamber
- processing chamber
- processing
- supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 4
- 238000011084 recovery Methods 0.000 claims description 4
- 238000010884 ion-beam technique Methods 0.000 claims description 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17705786U JPS6382936U (enExample) | 1986-11-18 | 1986-11-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17705786U JPS6382936U (enExample) | 1986-11-18 | 1986-11-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6382936U true JPS6382936U (enExample) | 1988-05-31 |
Family
ID=31117901
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17705786U Pending JPS6382936U (enExample) | 1986-11-18 | 1986-11-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6382936U (enExample) |
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1986
- 1986-11-18 JP JP17705786U patent/JPS6382936U/ja active Pending