JPS6251171U - - Google Patents
Info
- Publication number
- JPS6251171U JPS6251171U JP14026585U JP14026585U JPS6251171U JP S6251171 U JPS6251171 U JP S6251171U JP 14026585 U JP14026585 U JP 14026585U JP 14026585 U JP14026585 U JP 14026585U JP S6251171 U JPS6251171 U JP S6251171U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- evacuated
- introduction
- adjacent
- substrates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14026585U JPS6251171U (enExample) | 1985-09-12 | 1985-09-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14026585U JPS6251171U (enExample) | 1985-09-12 | 1985-09-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6251171U true JPS6251171U (enExample) | 1987-03-30 |
Family
ID=31046951
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14026585U Pending JPS6251171U (enExample) | 1985-09-12 | 1985-09-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6251171U (enExample) |
-
1985
- 1985-09-12 JP JP14026585U patent/JPS6251171U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS5730341A (en) | Substrate processing device | |
| JPS6251171U (enExample) | ||
| JPS6169966A (ja) | 真空処理装置 | |
| JPH09111453A (ja) | 真空基板搬送装置及び真空基板搬送方法 | |
| JPS6245825U (enExample) | ||
| US4249846A (en) | Rotary vacuum seal for a wafer transport system | |
| JPH02441Y2 (enExample) | ||
| JPH02132657U (enExample) | ||
| JPH0341845U (enExample) | ||
| JPH0995783A (ja) | スパッタ装置 | |
| TWI819621B (zh) | 可抗污染之連續式電漿製程系統 | |
| JPH01253237A (ja) | 真空処理装置 | |
| JPS6128030B2 (enExample) | ||
| JP2501687Y2 (ja) | 基板交換装置 | |
| JPH0159354B2 (enExample) | ||
| JPH01173710A (ja) | 薄膜形成装置の基板保持機構 | |
| JPS61133556U (enExample) | ||
| JPH0639696B2 (ja) | 基板着脱装置 | |
| JPS6384866U (enExample) | ||
| JPH0650979Y2 (ja) | 成膜装置用基板保持機構 | |
| JPH01208466A (ja) | 被処理物の搬送方法及び搬送用パレツト | |
| JPH0726363Y2 (ja) | インライン式成膜装置 | |
| JPS62197577U (enExample) | ||
| JPS61150856U (enExample) | ||
| JPS62104148U (enExample) |