JPS61133556U - - Google Patents
Info
- Publication number
- JPS61133556U JPS61133556U JP1985017416U JP1741685U JPS61133556U JP S61133556 U JPS61133556 U JP S61133556U JP 1985017416 U JP1985017416 U JP 1985017416U JP 1741685 U JP1741685 U JP 1741685U JP S61133556 U JPS61133556 U JP S61133556U
- Authority
- JP
- Japan
- Prior art keywords
- ion
- disk
- wafer
- evaporation
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985017416U JPS61133556U (enExample) | 1985-02-09 | 1985-02-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985017416U JPS61133556U (enExample) | 1985-02-09 | 1985-02-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61133556U true JPS61133556U (enExample) | 1986-08-20 |
Family
ID=30505097
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985017416U Pending JPS61133556U (enExample) | 1985-02-09 | 1985-02-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61133556U (enExample) |
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1985
- 1985-02-09 JP JP1985017416U patent/JPS61133556U/ja active Pending