JPH039313U - - Google Patents
Info
- Publication number
- JPH039313U JPH039313U JP6972789U JP6972789U JPH039313U JP H039313 U JPH039313 U JP H039313U JP 6972789 U JP6972789 U JP 6972789U JP 6972789 U JP6972789 U JP 6972789U JP H039313 U JPH039313 U JP H039313U
- Authority
- JP
- Japan
- Prior art keywords
- transport tray
- pair
- tray
- rotating brushes
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000001947 vapour-phase growth Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6972789U JPH039313U (enExample) | 1989-06-16 | 1989-06-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6972789U JPH039313U (enExample) | 1989-06-16 | 1989-06-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH039313U true JPH039313U (enExample) | 1991-01-29 |
Family
ID=31605279
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6972789U Pending JPH039313U (enExample) | 1989-06-16 | 1989-06-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH039313U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005343449A (ja) * | 2004-06-02 | 2005-12-15 | Bayerische Motoren Werke Ag | アウトサイドミラー |
-
1989
- 1989-06-16 JP JP6972789U patent/JPH039313U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005343449A (ja) * | 2004-06-02 | 2005-12-15 | Bayerische Motoren Werke Ag | アウトサイドミラー |