JPS63118228U - - Google Patents
Info
- Publication number
- JPS63118228U JPS63118228U JP1987008442U JP844287U JPS63118228U JP S63118228 U JPS63118228 U JP S63118228U JP 1987008442 U JP1987008442 U JP 1987008442U JP 844287 U JP844287 U JP 844287U JP S63118228 U JPS63118228 U JP S63118228U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- shutter
- rotating shaft
- evaporation sources
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987008442U JPS63118228U (enExample) | 1987-01-23 | 1987-01-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987008442U JPS63118228U (enExample) | 1987-01-23 | 1987-01-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63118228U true JPS63118228U (enExample) | 1988-07-30 |
Family
ID=30792821
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987008442U Pending JPS63118228U (enExample) | 1987-01-23 | 1987-01-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63118228U (enExample) |
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1987
- 1987-01-23 JP JP1987008442U patent/JPS63118228U/ja active Pending