JPH0298627U - - Google Patents
Info
- Publication number
- JPH0298627U JPH0298627U JP1989007734U JP773489U JPH0298627U JP H0298627 U JPH0298627 U JP H0298627U JP 1989007734 U JP1989007734 U JP 1989007734U JP 773489 U JP773489 U JP 773489U JP H0298627 U JPH0298627 U JP H0298627U
- Authority
- JP
- Japan
- Prior art keywords
- evaporation
- thin film
- shutter
- rotating shaft
- sources
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989007734U JPH0298627U (enExample) | 1989-01-26 | 1989-01-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989007734U JPH0298627U (enExample) | 1989-01-26 | 1989-01-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0298627U true JPH0298627U (enExample) | 1990-08-06 |
Family
ID=31212998
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989007734U Pending JPH0298627U (enExample) | 1989-01-26 | 1989-01-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0298627U (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63204712A (ja) * | 1987-02-20 | 1988-08-24 | Fujitsu Ltd | 分子線結晶成長装置 |
-
1989
- 1989-01-26 JP JP1989007734U patent/JPH0298627U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63204712A (ja) * | 1987-02-20 | 1988-08-24 | Fujitsu Ltd | 分子線結晶成長装置 |