JPS6373352U - - Google Patents
Info
- Publication number
- JPS6373352U JPS6373352U JP16515286U JP16515286U JPS6373352U JP S6373352 U JPS6373352 U JP S6373352U JP 16515286 U JP16515286 U JP 16515286U JP 16515286 U JP16515286 U JP 16515286U JP S6373352 U JPS6373352 U JP S6373352U
- Authority
- JP
- Japan
- Prior art keywords
- evaporation
- shutter
- substrate
- cuts
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001704 evaporation Methods 0.000 claims description 7
- 230000008020 evaporation Effects 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 4
- 238000010884 ion-beam technique Methods 0.000 claims description 3
- 238000007738 vacuum evaporation Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16515286U JPS6373352U (enExample) | 1986-10-27 | 1986-10-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16515286U JPS6373352U (enExample) | 1986-10-27 | 1986-10-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6373352U true JPS6373352U (enExample) | 1988-05-16 |
Family
ID=31094922
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16515286U Pending JPS6373352U (enExample) | 1986-10-27 | 1986-10-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6373352U (enExample) |
-
1986
- 1986-10-27 JP JP16515286U patent/JPS6373352U/ja active Pending