JPS6398365U - - Google Patents
Info
- Publication number
- JPS6398365U JPS6398365U JP19193686U JP19193686U JPS6398365U JP S6398365 U JPS6398365 U JP S6398365U JP 19193686 U JP19193686 U JP 19193686U JP 19193686 U JP19193686 U JP 19193686U JP S6398365 U JPS6398365 U JP S6398365U
- Authority
- JP
- Japan
- Prior art keywords
- evaporation
- breakdown
- shutter
- ion
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000015556 catabolic process Effects 0.000 claims description 8
- 239000002245 particle Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 3
- 238000010884 ion-beam technique Methods 0.000 claims description 3
- 230000008020 evaporation Effects 0.000 claims 9
- 238000001704 evaporation Methods 0.000 claims 9
- 230000008021 deposition Effects 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000010408 film Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19193686U JPS6398365U (enExample) | 1986-12-12 | 1986-12-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19193686U JPS6398365U (enExample) | 1986-12-12 | 1986-12-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6398365U true JPS6398365U (enExample) | 1988-06-25 |
Family
ID=31146546
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19193686U Pending JPS6398365U (enExample) | 1986-12-12 | 1986-12-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6398365U (enExample) |
-
1986
- 1986-12-12 JP JP19193686U patent/JPS6398365U/ja active Pending
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