JPS62182536U - - Google Patents
Info
- Publication number
- JPS62182536U JPS62182536U JP1986068746U JP6874686U JPS62182536U JP S62182536 U JPS62182536 U JP S62182536U JP 1986068746 U JP1986068746 U JP 1986068746U JP 6874686 U JP6874686 U JP 6874686U JP S62182536 U JPS62182536 U JP S62182536U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- source
- ion source
- substrate
- production device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986068746U JPS62182536U (enExample) | 1986-05-09 | 1986-05-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986068746U JPS62182536U (enExample) | 1986-05-09 | 1986-05-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62182536U true JPS62182536U (enExample) | 1987-11-19 |
Family
ID=30908846
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986068746U Pending JPS62182536U (enExample) | 1986-05-09 | 1986-05-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62182536U (enExample) |
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1986
- 1986-05-09 JP JP1986068746U patent/JPS62182536U/ja active Pending