JPS6251170U - - Google Patents
Info
- Publication number
- JPS6251170U JPS6251170U JP1985143386U JP14338685U JPS6251170U JP S6251170 U JPS6251170 U JP S6251170U JP 1985143386 U JP1985143386 U JP 1985143386U JP 14338685 U JP14338685 U JP 14338685U JP S6251170 U JPS6251170 U JP S6251170U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- planetarium
- annular holder
- revolves
- attaching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985143386U JPS6251170U (enExample) | 1985-09-19 | 1985-09-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985143386U JPS6251170U (enExample) | 1985-09-19 | 1985-09-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6251170U true JPS6251170U (enExample) | 1987-03-30 |
Family
ID=31053022
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985143386U Pending JPS6251170U (enExample) | 1985-09-19 | 1985-09-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6251170U (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0297035A (ja) * | 1988-05-24 | 1990-04-09 | Balzers Ag | 真空処理装置及びそれによるワーク処理方法 |
| JP2006339181A (ja) * | 2005-05-31 | 2006-12-14 | Nec Electronics Corp | ウエハ保持治具 |
| JP2013032574A (ja) * | 2011-08-03 | 2013-02-14 | Nippon Electric Glass Co Ltd | スパッタリング成膜装置のカルーセル及びスパッタリング成膜装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5010235A (enExample) * | 1973-06-01 | 1975-02-01 |
-
1985
- 1985-09-19 JP JP1985143386U patent/JPS6251170U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5010235A (enExample) * | 1973-06-01 | 1975-02-01 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0297035A (ja) * | 1988-05-24 | 1990-04-09 | Balzers Ag | 真空処理装置及びそれによるワーク処理方法 |
| JP2006339181A (ja) * | 2005-05-31 | 2006-12-14 | Nec Electronics Corp | ウエハ保持治具 |
| JP2013032574A (ja) * | 2011-08-03 | 2013-02-14 | Nippon Electric Glass Co Ltd | スパッタリング成膜装置のカルーセル及びスパッタリング成膜装置 |