JPH0194451U - - Google Patents
Info
- Publication number
- JPH0194451U JPH0194451U JP18989087U JP18989087U JPH0194451U JP H0194451 U JPH0194451 U JP H0194451U JP 18989087 U JP18989087 U JP 18989087U JP 18989087 U JP18989087 U JP 18989087U JP H0194451 U JPH0194451 U JP H0194451U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- lid
- center
- evaporation source
- small hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008020 evaporation Effects 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims description 4
- 239000002994 raw material Substances 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18989087U JPH0194451U (enExample) | 1987-12-16 | 1987-12-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18989087U JPH0194451U (enExample) | 1987-12-16 | 1987-12-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0194451U true JPH0194451U (enExample) | 1989-06-21 |
Family
ID=31480898
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18989087U Pending JPH0194451U (enExample) | 1987-12-16 | 1987-12-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0194451U (enExample) |
-
1987
- 1987-12-16 JP JP18989087U patent/JPH0194451U/ja active Pending