JPH0253974U - - Google Patents
Info
- Publication number
- JPH0253974U JPH0253974U JP13360188U JP13360188U JPH0253974U JP H0253974 U JPH0253974 U JP H0253974U JP 13360188 U JP13360188 U JP 13360188U JP 13360188 U JP13360188 U JP 13360188U JP H0253974 U JPH0253974 U JP H0253974U
- Authority
- JP
- Japan
- Prior art keywords
- shroud
- molecular beam
- hole
- beam source
- source cell
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims 1
- 230000008020 evaporation Effects 0.000 claims 1
- 238000001704 evaporation Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000007788 liquid Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13360188U JPH0253974U (enExample) | 1988-10-13 | 1988-10-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13360188U JPH0253974U (enExample) | 1988-10-13 | 1988-10-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0253974U true JPH0253974U (enExample) | 1990-04-18 |
Family
ID=31391613
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13360188U Pending JPH0253974U (enExample) | 1988-10-13 | 1988-10-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0253974U (enExample) |
-
1988
- 1988-10-13 JP JP13360188U patent/JPH0253974U/ja active Pending