JPS6441900A - X-ray exposure system - Google Patents

X-ray exposure system

Info

Publication number
JPS6441900A
JPS6441900A JP62196259A JP19625987A JPS6441900A JP S6441900 A JPS6441900 A JP S6441900A JP 62196259 A JP62196259 A JP 62196259A JP 19625987 A JP19625987 A JP 19625987A JP S6441900 A JPS6441900 A JP S6441900A
Authority
JP
Japan
Prior art keywords
mirror
slit
synchrotron radiation
ray
radiation ray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62196259A
Other languages
Japanese (ja)
Inventor
Kiyoshi Fujii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP62196259A priority Critical patent/JPS6441900A/en
Publication of JPS6441900A publication Critical patent/JPS6441900A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE:To transfer a large area with a uniform intensity, by placing a slit continuously controllable from the outside, between a source of a synchrotron radiation ray and an X-ray mirror. CONSTITUTION:A slit 11 is placed between a source 2 of synchrotron radiation ray and a vibrating X-ray mirror 8. The synchrotron radiation ray 3 from the source 2 is projected into the mirror 8, being restricted on its lengthwise beam width. The vibration of the mirror 8 and the movement of the slit 11 is synchronized by controlling the slit driving 13 and the mirror driving 14, based on signals from a controller 12. With compensating a variation of the synchrotron radiation ray caused by an incident angle of the mirror 8 by a width of the slit 11, the synchrotron radiation ray with a specifically uniform intensity is always irradiated to a resist membrane 5, independently from the incident angle of the mirror 8. Thereby a transfer of large area with an uniform intensity is accomplished.
JP62196259A 1987-08-07 1987-08-07 X-ray exposure system Pending JPS6441900A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62196259A JPS6441900A (en) 1987-08-07 1987-08-07 X-ray exposure system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62196259A JPS6441900A (en) 1987-08-07 1987-08-07 X-ray exposure system

Publications (1)

Publication Number Publication Date
JPS6441900A true JPS6441900A (en) 1989-02-14

Family

ID=16354834

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62196259A Pending JPS6441900A (en) 1987-08-07 1987-08-07 X-ray exposure system

Country Status (1)

Country Link
JP (1) JPS6441900A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5127029A (en) * 1989-03-22 1992-06-30 Canon Kabushiki Kaisha X-ray exposure apparatus
JPH06273599A (en) * 1993-03-24 1994-09-30 Soltec:Kk Radiation light exposure device
KR100902823B1 (en) * 2002-10-04 2009-06-12 주식회사 포스코 Apparatus for separating the lump steel sticked on the top of a ladle

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5127029A (en) * 1989-03-22 1992-06-30 Canon Kabushiki Kaisha X-ray exposure apparatus
JPH06273599A (en) * 1993-03-24 1994-09-30 Soltec:Kk Radiation light exposure device
KR100902823B1 (en) * 2002-10-04 2009-06-12 주식회사 포스코 Apparatus for separating the lump steel sticked on the top of a ladle

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