JPH01147273U - - Google Patents
Info
- Publication number
- JPH01147273U JPH01147273U JP1988044415U JP4441588U JPH01147273U JP H01147273 U JPH01147273 U JP H01147273U JP 1988044415 U JP1988044415 U JP 1988044415U JP 4441588 U JP4441588 U JP 4441588U JP H01147273 U JPH01147273 U JP H01147273U
- Authority
- JP
- Japan
- Prior art keywords
- growth chamber
- substrate holder
- molecular beam
- beam epitaxy
- growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988044415U JPH057253Y2 (enExample) | 1988-03-31 | 1988-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988044415U JPH057253Y2 (enExample) | 1988-03-31 | 1988-03-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01147273U true JPH01147273U (enExample) | 1989-10-11 |
| JPH057253Y2 JPH057253Y2 (enExample) | 1993-02-24 |
Family
ID=31270774
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988044415U Expired - Lifetime JPH057253Y2 (enExample) | 1988-03-31 | 1988-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH057253Y2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7879832B2 (ja) | 2023-03-31 | 2026-06-24 | ルネサスエレクトロニクス株式会社 | 半導体装置、時間計測方法及び時間計測プログラム |
-
1988
- 1988-03-31 JP JP1988044415U patent/JPH057253Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH057253Y2 (enExample) | 1993-02-24 |