JPH0330256U - - Google Patents
Info
- Publication number
- JPH0330256U JPH0330256U JP1989089413U JP8941389U JPH0330256U JP H0330256 U JPH0330256 U JP H0330256U JP 1989089413 U JP1989089413 U JP 1989089413U JP 8941389 U JP8941389 U JP 8941389U JP H0330256 U JPH0330256 U JP H0330256U
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- vacuum chamber
- slit
- slit hole
- generating means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989089413U JPH0330256U (enExample) | 1989-07-28 | 1989-07-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989089413U JPH0330256U (enExample) | 1989-07-28 | 1989-07-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0330256U true JPH0330256U (enExample) | 1991-03-25 |
Family
ID=31638992
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989089413U Pending JPH0330256U (enExample) | 1989-07-28 | 1989-07-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0330256U (enExample) |
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1989
- 1989-07-28 JP JP1989089413U patent/JPH0330256U/ja active Pending