JPH01147272U - - Google Patents
Info
- Publication number
- JPH01147272U JPH01147272U JP4283188U JP4283188U JPH01147272U JP H01147272 U JPH01147272 U JP H01147272U JP 4283188 U JP4283188 U JP 4283188U JP 4283188 U JP4283188 U JP 4283188U JP H01147272 U JPH01147272 U JP H01147272U
- Authority
- JP
- Japan
- Prior art keywords
- evaporation source
- shutter
- growth chamber
- opening
- shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000008020 evaporation Effects 0.000 claims description 8
- 238000001704 evaporation Methods 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 4
- 238000001451 molecular beam epitaxy Methods 0.000 claims 2
- 230000002452 interceptive effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4283188U JPH057252Y2 (enExample) | 1988-03-30 | 1988-03-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4283188U JPH057252Y2 (enExample) | 1988-03-30 | 1988-03-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01147272U true JPH01147272U (enExample) | 1989-10-11 |
| JPH057252Y2 JPH057252Y2 (enExample) | 1993-02-24 |
Family
ID=31269235
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4283188U Expired - Lifetime JPH057252Y2 (enExample) | 1988-03-30 | 1988-03-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH057252Y2 (enExample) |
-
1988
- 1988-03-30 JP JP4283188U patent/JPH057252Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH057252Y2 (enExample) | 1993-02-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CA2094252A1 (en) | Rotating magnetron incorporating a removable cathode | |
| JPH01147272U (enExample) | ||
| JPH01147271U (enExample) | ||
| JPH01147273U (enExample) | ||
| US5429705A (en) | Apparatus for coating and/or etching substrates in a vacuum chamber | |
| JPS60131966A (ja) | スパツタ装置 | |
| USD249084S (en) | Poker aid card | |
| JPH0413049U (enExample) | ||
| JPH0213483Y2 (enExample) | ||
| USD324516S (en) | Micro-endless tape cartridge | |
| JPS6428372A (en) | Substrate holding mechanism | |
| JPH0282767U (enExample) | ||
| CA2043541A1 (en) | Process for preparing high-temperature superconducting thin films | |
| JPS63118228U (enExample) | ||
| JPS6334166U (enExample) | ||
| USD303287S (en) | Medical instruction plate for an insufflation apparatus | |
| SU547469A1 (ru) | Питательна среда дл выращивани хлебопекарных дрожжей | |
| JPS6311559U (enExample) | ||
| JPH03120555U (enExample) | ||
| JPS6418148U (enExample) | ||
| JPH0330435U (enExample) | ||
| JPS6475677A (en) | Film forming device | |
| JPH0448272U (enExample) | ||
| JPS6217027B2 (enExample) | ||
| JPH0233257U (enExample) |