JPS6394957U - - Google Patents
Info
- Publication number
- JPS6394957U JPS6394957U JP1986187848U JP18784886U JPS6394957U JP S6394957 U JPS6394957 U JP S6394957U JP 1986187848 U JP1986187848 U JP 1986187848U JP 18784886 U JP18784886 U JP 18784886U JP S6394957 U JPS6394957 U JP S6394957U
- Authority
- JP
- Japan
- Prior art keywords
- source
- vapor deposition
- evaporation
- emitting section
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986187848U JPS6394957U (enExample) | 1986-12-08 | 1986-12-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986187848U JPS6394957U (enExample) | 1986-12-08 | 1986-12-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6394957U true JPS6394957U (enExample) | 1988-06-18 |
Family
ID=31138682
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986187848U Pending JPS6394957U (enExample) | 1986-12-08 | 1986-12-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6394957U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20160090017A (ko) * | 2015-01-21 | 2016-07-29 | 엘지이노텍 주식회사 | 발광 소자 및 이를 제조하는 전자 빔 증착 장치 |
-
1986
- 1986-12-08 JP JP1986187848U patent/JPS6394957U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20160090017A (ko) * | 2015-01-21 | 2016-07-29 | 엘지이노텍 주식회사 | 발광 소자 및 이를 제조하는 전자 빔 증착 장치 |