JPS63106758U - - Google Patents
Info
- Publication number
- JPS63106758U JPS63106758U JP20160186U JP20160186U JPS63106758U JP S63106758 U JPS63106758 U JP S63106758U JP 20160186 U JP20160186 U JP 20160186U JP 20160186 U JP20160186 U JP 20160186U JP S63106758 U JPS63106758 U JP S63106758U
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- crucible
- melting point
- point metal
- high melting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007740 vapor deposition Methods 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 6
- 239000000126 substance Substances 0.000 claims description 2
- 230000008018 melting Effects 0.000 claims 4
- 238000002844 melting Methods 0.000 claims 4
- 239000002184 metal Substances 0.000 claims 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 229910002804 graphite Inorganic materials 0.000 claims 1
- 239000010439 graphite Substances 0.000 claims 1
- 230000008020 evaporation Effects 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20160186U JPS63106758U (enExample) | 1986-12-25 | 1986-12-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20160186U JPS63106758U (enExample) | 1986-12-25 | 1986-12-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63106758U true JPS63106758U (enExample) | 1988-07-09 |
Family
ID=31165210
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20160186U Pending JPS63106758U (enExample) | 1986-12-25 | 1986-12-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63106758U (enExample) |
-
1986
- 1986-12-25 JP JP20160186U patent/JPS63106758U/ja active Pending
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