JPS63115063U - - Google Patents
Info
- Publication number
- JPS63115063U JPS63115063U JP699287U JP699287U JPS63115063U JP S63115063 U JPS63115063 U JP S63115063U JP 699287 U JP699287 U JP 699287U JP 699287 U JP699287 U JP 699287U JP S63115063 U JPS63115063 U JP S63115063U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- crucible
- vacuum chamber
- forming apparatus
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 5
- 238000007740 vapor deposition Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims 1
- 230000008016 vaporization Effects 0.000 claims 1
- 230000008021 deposition Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP699287U JPH0449173Y2 (enExample) | 1987-01-22 | 1987-01-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP699287U JPH0449173Y2 (enExample) | 1987-01-22 | 1987-01-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63115063U true JPS63115063U (enExample) | 1988-07-25 |
| JPH0449173Y2 JPH0449173Y2 (enExample) | 1992-11-19 |
Family
ID=30790032
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP699287U Expired JPH0449173Y2 (enExample) | 1987-01-22 | 1987-01-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0449173Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011134723A (ja) * | 2005-02-18 | 2011-07-07 | Semiconductor Energy Lab Co Ltd | 蒸着装置及びｅｌ素子の作製方法 |
-
1987
- 1987-01-22 JP JP699287U patent/JPH0449173Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011134723A (ja) * | 2005-02-18 | 2011-07-07 | Semiconductor Energy Lab Co Ltd | 蒸着装置及びｅｌ素子の作製方法 |
| US9093402B2 (en) | 2005-02-18 | 2015-07-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0449173Y2 (enExample) | 1992-11-19 |
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