JPS62175070U - - Google Patents
Info
- Publication number
- JPS62175070U JPS62175070U JP1986060541U JP6054186U JPS62175070U JP S62175070 U JPS62175070 U JP S62175070U JP 1986060541 U JP1986060541 U JP 1986060541U JP 6054186 U JP6054186 U JP 6054186U JP S62175070 U JPS62175070 U JP S62175070U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- substrate attachment
- attachment part
- evaporation source
- evaporation apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986060541U JPS62175070U (enExample) | 1986-04-22 | 1986-04-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986060541U JPS62175070U (enExample) | 1986-04-22 | 1986-04-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62175070U true JPS62175070U (enExample) | 1987-11-06 |
Family
ID=30893040
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986060541U Pending JPS62175070U (enExample) | 1986-04-22 | 1986-04-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62175070U (enExample) |
-
1986
- 1986-04-22 JP JP1986060541U patent/JPS62175070U/ja active Pending