JPH0322061U - - Google Patents
Info
- Publication number
- JPH0322061U JPH0322061U JP1989080308U JP8030889U JPH0322061U JP H0322061 U JPH0322061 U JP H0322061U JP 1989080308 U JP1989080308 U JP 1989080308U JP 8030889 U JP8030889 U JP 8030889U JP H0322061 U JPH0322061 U JP H0322061U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- substrate holder
- thin film
- lamps
- holds
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989080308U JPH0322061U (enExample) | 1989-07-07 | 1989-07-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989080308U JPH0322061U (enExample) | 1989-07-07 | 1989-07-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0322061U true JPH0322061U (enExample) | 1991-03-06 |
Family
ID=31625250
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989080308U Pending JPH0322061U (enExample) | 1989-07-07 | 1989-07-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0322061U (enExample) |
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1989
- 1989-07-07 JP JP1989080308U patent/JPH0322061U/ja active Pending