JPS61120756U - - Google Patents
Info
- Publication number
- JPS61120756U JPS61120756U JP346785U JP346785U JPS61120756U JP S61120756 U JPS61120756 U JP S61120756U JP 346785 U JP346785 U JP 346785U JP 346785 U JP346785 U JP 346785U JP S61120756 U JPS61120756 U JP S61120756U
- Authority
- JP
- Japan
- Prior art keywords
- ion
- evaporation
- thin film
- forming apparatus
- film forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP346785U JPS61120756U (enExample) | 1985-01-14 | 1985-01-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP346785U JPS61120756U (enExample) | 1985-01-14 | 1985-01-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61120756U true JPS61120756U (enExample) | 1986-07-30 |
Family
ID=30478122
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP346785U Pending JPS61120756U (enExample) | 1985-01-14 | 1985-01-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61120756U (enExample) |
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1985
- 1985-01-14 JP JP346785U patent/JPS61120756U/ja active Pending