JPH01153634U - - Google Patents
Info
- Publication number
- JPH01153634U JPH01153634U JP4660288U JP4660288U JPH01153634U JP H01153634 U JPH01153634 U JP H01153634U JP 4660288 U JP4660288 U JP 4660288U JP 4660288 U JP4660288 U JP 4660288U JP H01153634 U JPH01153634 U JP H01153634U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- susceptor
- barrel
- thin film
- vapor phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 claims description 8
- 238000001947 vapour-phase growth Methods 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 6
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 2
- 229910052750 molybdenum Inorganic materials 0.000 claims description 2
- 239000011733 molybdenum Substances 0.000 claims description 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4660288U JPH0627946Y2 (ja) | 1988-04-05 | 1988-04-05 | 縦型薄膜気相成長装置のバレル型サセプタ装着ウエハ加熱部 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4660288U JPH0627946Y2 (ja) | 1988-04-05 | 1988-04-05 | 縦型薄膜気相成長装置のバレル型サセプタ装着ウエハ加熱部 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01153634U true JPH01153634U (enExample) | 1989-10-23 |
| JPH0627946Y2 JPH0627946Y2 (ja) | 1994-07-27 |
Family
ID=31272869
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4660288U Expired - Lifetime JPH0627946Y2 (ja) | 1988-04-05 | 1988-04-05 | 縦型薄膜気相成長装置のバレル型サセプタ装着ウエハ加熱部 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0627946Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0653145A (ja) * | 1992-07-28 | 1994-02-25 | Ngk Insulators Ltd | 半導体ウェハー加熱装置 |
-
1988
- 1988-04-05 JP JP4660288U patent/JPH0627946Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0653145A (ja) * | 1992-07-28 | 1994-02-25 | Ngk Insulators Ltd | 半導体ウェハー加熱装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0627946Y2 (ja) | 1994-07-27 |