JPH01136181U - - Google Patents
Info
- Publication number
- JPH01136181U JPH01136181U JP1988026717U JP2671788U JPH01136181U JP H01136181 U JPH01136181 U JP H01136181U JP 1988026717 U JP1988026717 U JP 1988026717U JP 2671788 U JP2671788 U JP 2671788U JP H01136181 U JPH01136181 U JP H01136181U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- chamber
- heater
- vacuum
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988026717U JPH01136181U (enExample) | 1988-02-29 | 1988-02-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988026717U JPH01136181U (enExample) | 1988-02-29 | 1988-02-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01136181U true JPH01136181U (enExample) | 1989-09-18 |
Family
ID=31248596
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988026717U Pending JPH01136181U (enExample) | 1988-02-29 | 1988-02-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01136181U (enExample) |
-
1988
- 1988-02-29 JP JP1988026717U patent/JPH01136181U/ja active Pending
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