JPH0290667U - - Google Patents
Info
- Publication number
- JPH0290667U JPH0290667U JP1988169396U JP16939688U JPH0290667U JP H0290667 U JPH0290667 U JP H0290667U JP 1988169396 U JP1988169396 U JP 1988169396U JP 16939688 U JP16939688 U JP 16939688U JP H0290667 U JPH0290667 U JP H0290667U
- Authority
- JP
- Japan
- Prior art keywords
- sample stage
- sample
- engaging
- stage holding
- sample stand
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988169396U JPH0638111Y2 (ja) | 1988-12-29 | 1988-12-29 | 成膜装置の試料台保持機構 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988169396U JPH0638111Y2 (ja) | 1988-12-29 | 1988-12-29 | 成膜装置の試料台保持機構 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0290667U true JPH0290667U (enExample) | 1990-07-18 |
| JPH0638111Y2 JPH0638111Y2 (ja) | 1994-10-05 |
Family
ID=31459415
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988169396U Expired - Lifetime JPH0638111Y2 (ja) | 1988-12-29 | 1988-12-29 | 成膜装置の試料台保持機構 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0638111Y2 (enExample) |
-
1988
- 1988-12-29 JP JP1988169396U patent/JPH0638111Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0638111Y2 (ja) | 1994-10-05 |