JPH0418659U - - Google Patents
Info
- Publication number
- JPH0418659U JPH0418659U JP5819290U JP5819290U JPH0418659U JP H0418659 U JPH0418659 U JP H0418659U JP 5819290 U JP5819290 U JP 5819290U JP 5819290 U JP5819290 U JP 5819290U JP H0418659 U JPH0418659 U JP H0418659U
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- atmospheric pressure
- chemical vapor
- deposition apparatus
- pressure chemical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5819290U JPH0418659U (enExample) | 1990-05-31 | 1990-05-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5819290U JPH0418659U (enExample) | 1990-05-31 | 1990-05-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0418659U true JPH0418659U (enExample) | 1992-02-17 |
Family
ID=31583577
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5819290U Pending JPH0418659U (enExample) | 1990-05-31 | 1990-05-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0418659U (enExample) |
-
1990
- 1990-05-31 JP JP5819290U patent/JPH0418659U/ja active Pending
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