JPS62122861U - - Google Patents
Info
- Publication number
- JPS62122861U JPS62122861U JP1986009914U JP991486U JPS62122861U JP S62122861 U JPS62122861 U JP S62122861U JP 1986009914 U JP1986009914 U JP 1986009914U JP 991486 U JP991486 U JP 991486U JP S62122861 U JPS62122861 U JP S62122861U
- Authority
- JP
- Japan
- Prior art keywords
- ion
- film forming
- disk
- wafers
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986009914U JPS62122861U (enExample) | 1986-01-27 | 1986-01-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986009914U JPS62122861U (enExample) | 1986-01-27 | 1986-01-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62122861U true JPS62122861U (enExample) | 1987-08-04 |
Family
ID=30795680
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986009914U Pending JPS62122861U (enExample) | 1986-01-27 | 1986-01-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62122861U (enExample) |
-
1986
- 1986-01-27 JP JP1986009914U patent/JPS62122861U/ja active Pending