JPS6381861U - - Google Patents
Info
- Publication number
- JPS6381861U JPS6381861U JP17736486U JP17736486U JPS6381861U JP S6381861 U JPS6381861 U JP S6381861U JP 17736486 U JP17736486 U JP 17736486U JP 17736486 U JP17736486 U JP 17736486U JP S6381861 U JPS6381861 U JP S6381861U
- Authority
- JP
- Japan
- Prior art keywords
- sputtering
- backing plate
- plate
- target
- overlapping part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims description 5
- 238000001755 magnetron sputter deposition Methods 0.000 claims 1
- 230000002265 prevention Effects 0.000 claims 1
- 239000013077 target material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17736486U JPS6381861U (enExample) | 1986-11-18 | 1986-11-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17736486U JPS6381861U (enExample) | 1986-11-18 | 1986-11-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6381861U true JPS6381861U (enExample) | 1988-05-30 |
Family
ID=31118499
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17736486U Pending JPS6381861U (enExample) | 1986-11-18 | 1986-11-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6381861U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001295038A (ja) * | 2000-04-11 | 2001-10-26 | Toshiba Corp | モザイク型スパッタリングターゲット |
-
1986
- 1986-11-18 JP JP17736486U patent/JPS6381861U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001295038A (ja) * | 2000-04-11 | 2001-10-26 | Toshiba Corp | モザイク型スパッタリングターゲット |