JPS61206672U - - Google Patents
Info
- Publication number
- JPS61206672U JPS61206672U JP8878885U JP8878885U JPS61206672U JP S61206672 U JPS61206672 U JP S61206672U JP 8878885 U JP8878885 U JP 8878885U JP 8878885 U JP8878885 U JP 8878885U JP S61206672 U JPS61206672 U JP S61206672U
- Authority
- JP
- Japan
- Prior art keywords
- target
- ferromagnetic material
- targets
- needle
- processed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003302 ferromagnetic material Substances 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
- 238000001755 magnetron sputter deposition Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
- Thin Magnetic Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8878885U JPS61206672U (enExample) | 1985-06-12 | 1985-06-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8878885U JPS61206672U (enExample) | 1985-06-12 | 1985-06-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61206672U true JPS61206672U (enExample) | 1986-12-27 |
Family
ID=30642262
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8878885U Pending JPS61206672U (enExample) | 1985-06-12 | 1985-06-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61206672U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02159373A (ja) * | 1988-11-30 | 1990-06-19 | Hiyo Ri | 多棒式マグネットロンスパッタリング装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59211211A (ja) * | 1983-05-17 | 1984-11-30 | Ulvac Corp | 強磁性体の高速スパツタ用タ−ゲツト |
-
1985
- 1985-06-12 JP JP8878885U patent/JPS61206672U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59211211A (ja) * | 1983-05-17 | 1984-11-30 | Ulvac Corp | 強磁性体の高速スパツタ用タ−ゲツト |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02159373A (ja) * | 1988-11-30 | 1990-06-19 | Hiyo Ri | 多棒式マグネットロンスパッタリング装置 |