JPS6252925U - - Google Patents
Info
- Publication number
- JPS6252925U JPS6252925U JP14436185U JP14436185U JPS6252925U JP S6252925 U JPS6252925 U JP S6252925U JP 14436185 U JP14436185 U JP 14436185U JP 14436185 U JP14436185 U JP 14436185U JP S6252925 U JPS6252925 U JP S6252925U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- crucible
- shield
- replenishment
- port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 5
- 230000008020 evaporation Effects 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims description 4
- 238000005566 electron beam evaporation Methods 0.000 claims description 3
- 238000011109 contamination Methods 0.000 claims 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14436185U JPS6252925U (enExample) | 1985-09-20 | 1985-09-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14436185U JPS6252925U (enExample) | 1985-09-20 | 1985-09-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6252925U true JPS6252925U (enExample) | 1987-04-02 |
Family
ID=31054888
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14436185U Pending JPS6252925U (enExample) | 1985-09-20 | 1985-09-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6252925U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009161828A (ja) * | 2008-01-09 | 2009-07-23 | Showa Shinku:Kk | 真空蒸着装置 |
| JP2013104106A (ja) * | 2011-11-15 | 2013-05-30 | Mitsubishi Electric Corp | 蒸着装置 |
-
1985
- 1985-09-20 JP JP14436185U patent/JPS6252925U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009161828A (ja) * | 2008-01-09 | 2009-07-23 | Showa Shinku:Kk | 真空蒸着装置 |
| JP2013104106A (ja) * | 2011-11-15 | 2013-05-30 | Mitsubishi Electric Corp | 蒸着装置 |