JPS63111748U - - Google Patents
Info
- Publication number
- JPS63111748U JPS63111748U JP257987U JP257987U JPS63111748U JP S63111748 U JPS63111748 U JP S63111748U JP 257987 U JP257987 U JP 257987U JP 257987 U JP257987 U JP 257987U JP S63111748 U JPS63111748 U JP S63111748U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- metal thin
- analytical
- opening
- irradiation hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 13
- 239000010409 thin film Substances 0.000 claims description 12
- 238000010884 ion-beam technique Methods 0.000 claims description 3
- 239000012779 reinforcing material Substances 0.000 claims 2
- 238000001004 secondary ion mass spectrometry Methods 0.000 claims 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP257987U JPS63111748U (enExample) | 1987-01-12 | 1987-01-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP257987U JPS63111748U (enExample) | 1987-01-12 | 1987-01-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63111748U true JPS63111748U (enExample) | 1988-07-18 |
Family
ID=30781551
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP257987U Pending JPS63111748U (enExample) | 1987-01-12 | 1987-01-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63111748U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6450351A (en) * | 1987-08-20 | 1989-02-27 | Hitachi Ltd | Electrification preventive method |
| CN112624036A (zh) * | 2020-12-07 | 2021-04-09 | 浙江大学 | 电子束或离子束在绝缘材料表面成像或微纳加工的方法 |
-
1987
- 1987-01-12 JP JP257987U patent/JPS63111748U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6450351A (en) * | 1987-08-20 | 1989-02-27 | Hitachi Ltd | Electrification preventive method |
| CN112624036A (zh) * | 2020-12-07 | 2021-04-09 | 浙江大学 | 电子束或离子束在绝缘材料表面成像或微纳加工的方法 |
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